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TC Wafer Wafer Temperature Measurement System

Product Introduction

The TC Wafer Wafer Temperature Measurement System embeds high-temperature resistant thermocouple sensors on the wafer surface using independently developed core technologies, enabling real-time monitoring and recording of temperature change data during the wafer manufacturing process. It provides an efficient and reliable method for monitoring and optimizing key process parameters in semiconductor manufacturing.

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Introducción del producto

Physical Vapor Deposition (PVD), Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Annealing Furnaces, De-ashing Equipment, Wafer Temporary Bonding, Coating & Development TRACK Equipment, Heating Plates, Heating Disks

Product Advantages

1、1200℃ High-temperature Resistance: The thermocouple sensor can withstand temperatures up to 1200℃, making TC Wafer suitable for monitoring semiconductor manufacturing processes under extreme temperature conditions.
3、Precise Real-time Temperature Monitoring: Provides accurate temperature data for specific positions on the wafer.
4、Detailed Temperature Distribution Map: By collecting temperature data from multiple points on the wafer, it offers a comprehensive temperature distribution to help identify uneven heating or cooling issues.
5、Transient Temperature Tracking: Captures rapid temperature dynamics, such as key parameter changes in heating, cooling, isothermal processes, and delay times, providing data support for process optimization.
6、Supports Process Control and Optimization: Continuous monitoring of temperature changes during wafer heat treatment helps engineers adjust process parameters, improving production efficiency and ensuring product quality.
7、Compatible with Multiple Wafer Sizes: Designed to accommodate different wafer diameters, including 2-inch up to 12-inch wafers, meeting various manufacturing needs.

Product Parameters

Wafer Size	2", 3", 4", 6", 8", 12"	Wafer Material	Silicon Wafer/Sapphire, etc.
Number of Temperature Measurement Points	1-34	Wire Length	L1-Internal Cavity; L2-Chamber Door Transition Section; L3-External Cavity
Temperature Sensing Element	TC	Sampling Frequency	1Hz
TC Wire Diameter	0.127mm/0.254mm	Supporting Host	Temperature Measurement System Host
Temperature Range	K-type: RT~1200°C; R/S-type: RT~1200°C; T-type: RT~350°C; TR High-precision Type: -40-250°C / -40-350°C
Temperature Accuracy	K-type: +1.1°C/0.4%; R/S-type: ±0.6°C/0.1%; T-type: 0.5°C; TR High-precision Type: 0.1°C/+0.5°C
Temperature Measurement Software	Specialized software for real-time display of temperature field profiles and heating curves

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